Part of the Oxford Instruments Group
The NMT04 NanoMechanical Testing System stands at the forefront of in-situ SEM/FIB nanoindentation technology. Leveraging FemtoTools' exclusive MEMS technology, it provides unmatched precision for analyzing materials on the micro- and nanoscale.
With MEMS-based force sensors, the NMT04 boasts exceptional resolution, repeatability, and dynamic response. This system is ideal for nanoindentation of metals, ceramics, thin films, and micro-scale structures like metamaterials and MEMS. It features expandable capabilities via accessories for diverse research fields.
It excels in applications such as micro-compression testing, tensile testing of thin films or nanowires, and fracture testing of micro-beams. This provides precise quantification of plastic deformation, crack growth, and fracture toughness. Its compact design fits most commercial SEMs, enabling comprehensive correlative analysis with techniques like EBSD and EDX.
Micro-Electro-Mechanical System (MEMS)-based force sensors have an unmatched dynamic range of up to 100 kHz, thanks to their exceptionally small mobile mass and high stiffness. Moreover, the fine fabrication tolerances of MEMS achieve the lowest possible noise floor, reaching down to 500 pN.
up to100 kHz |
down to 500pN |
|
| Resonance frequency | Force noise floor |
Displacement-controlled nanoindentation is essential for measuring and comparing mechanical properties at consistent indentation depths, ensuring the probing of equivalent material volumes.
Inherently Displacement Controlled | ||
| Control mode |
The NMT04 is specially-designed to work seamlessly with Electron Backscatter Diffraction (EBSD) or Scanning Transmission Electron Microscopy (STEM) detectors inside the SEM. Its open measurement frame enables simultaneous observation and analysis of the evolution of the microstructure of the sample during mechanical testing.
The high-temperature module enables mechanical testing, such as nanoindentation, micro-pillar compression, micro-cantilever bending, micro-tensile testing at controlled temperatures up to 800°C. In combination with our microforce sensing probes featuring tip heating, controlled isotherm testing is possible.
| Temperature range | Oxidation prevention | |
| High-Temperature Module | 800 °C | Vacuum |
Combining an exchangeable sample stage with a piezoscanner and a FemtoTools 2-Axis Microforce Sensing Probe enables advanced techniques, such as nano-scratch and nano-wear testing, as well as SPM imaging, by facilitating the in-plane movement of the sample while simultaneously applying a normal force.
| Travel range | Noise floor | |
| Piezo-Scanner | 20 µm | 50 pm |
The rotation stage permits the rotary alignment of samples to the indenter tip, making it possible to test multiple samples in one session by using the rotation stage as a sample revolver. Additionally, it simplifies correlative nanomechanical testing by allowing the sample to be rotated easily between the indentation and imaging positions.
*Currently not available in the USA and Japan.
| Travel range | Noise floor | |
| Rotation Stage | 360 ° | 35 µ° |
This MEMS-based Tensile Testing Chip consists of a movable body that is suspended by four flexures within an outer, fixed frame. It enables the tensile testing of samples thin enough to be electron-transparent, allowing for simultaneous imaging with Scanning Transmission Electron Microscopy (STEM) or Transmission Kikuchi Diffraction (TKD).
| Gap sizes | |||||
| Nano-Tensile Testing Chip | 100 µm | 50 µm | 10 µm | 7.5 µm | 5 µm |
The FT-S Microforce Sensing Probes are sensors capable of measuring forces from sub-nanonewton to 2 newtons along the sensor’s probe axis. They are available with a wide variety of tip materials and geometries, including diamond Berkovich, cube corner, flat punch, wedge, conical, and more.
| Force range | Force resolution (noise at 10 Hz) | |
| FT-S200 | +/- 200 µN | 500 pN |
| FT-S2’000 | +/- 2 mN | 5 nN |
| FT-S20’000 | +/- 20 mN | 50 nN |
| FT-S200’000 | +/- 200 mN | 500 nN |
| FT-S2’000’000 | +/- 2 N | 5 µN |
The FT-S Two-Axis Microforce Sensing Probes are Micro-Electro Mechanical Systems (MEMS) based multi-axis microforce sensors capable of simultaneous measuring forces in the two in-plane directions. The primary application for these sensors is nano-scratch, nano-tribology and nano-wear testing.
| Force range | Force resolution (at 10 Hz) | |
| Force Sensing | +/- 20 mN | 100 nN |
| Tangential Force Sensing | +/- 20 mN | 100 nN |
The High-Temperature Microforce Sensing Probes are Micro-Electro Mechanical Systems (MEMS) based microforce sensors capable of measuring forces from 200mN to 2 µN. Furthermore, with the monolithically integrated tip heater, the temperature of the nanoindenter tip can be accurately matched to the temperature of the sample, enabling isothermal testing conditions.
| Force range | Force resolution (noise at 10 Hz) | |
| Force Sensing | +/- 200 mN | 1 µN |
If you have any questions, or would like to speak to an expert or request pricing, we will reply to your enquiry shortly.
Get In Touch
FemtoTools AG, Furtbachstrasse 4, 8107 Buchs/ZH, Switzerland, CHE-113.745.251
© Oxford Instruments 2025
